MEMS Cantilevers

Efficient mode characterization

Cantilevers are  operated  in air, liquid, and under vacuum. Multi-frequency excitation, torsional modes and geometry optimization of cantilevers requires efficient comparison between simulation and experimental data. Cantilever tips have often large and fast vertical  displacements.

Dynamic topography & Vibrations maps

Using the Holographic MEMS Analyzer, MEMS designer visualize in real time the 3D shape of the cantilever by changing the excitation frequency and voltage. Both time response and frequency response are accessible. This unique set of data enables you to fully characterize your cantilever dynamic response.

  • Time response in 3D
  • Amplitude and Phase vibrations maps

The DHM® enables a representation of the vibration over the sample with a lateral resolution only limited by diffraction. Point sensors, such as the laser doppler vibrometer, cannot resolve so detailed.

AFM cantilever : live visualization of mode shape
Amplitude vibration map @ 19.8 kHz
Amplitude vibration map @ 123.7 kHz
Amplitude vibration map @ 172.6 kHz
Phase vibration map @ 19.8 kHz
Phase vibration map @ 123.7 kHz
Phase vibration map @ 172.6 kHz