Metasurface characterization

Meta surfaces modulate the phase of the light

A meta surface, or a meta device, is a substrate structured with sub-wavelength-scaled patterns in the horizontal dimension. They modulate the behaviors of electromagnetic waves in the three dimensional (3D) space. As illustrated by this application, DHM® are ideal tools to measure their effects.


  • Courtesy of : Nanophotonics and Metrology Laboratory, Swiss Federal Institute of Technology Lausanne (EPFL)
  • Material: Meta Surface
  • Instrument: DHM® R-1000 with polarization control
  • Magnification: 100x
Quantitative phase measurements at the image plane for an RCP incident light. (a-d) SEM images of a nanoantennas array (partial view). The scale bar is 500 nm. (a) : lens (b) slow linear variation (c) fast linear variation (d) vortex beam generator. (e-f) Corresponding phase contrasted images of a full array of nanoantennas. The scale bar is 10 μm. The limits of the gray scale are -π and π. (i-l) Corresponding unwrapped phase. The limits of the color bars correspond to the phase functions used to design the structures. (m-p) Cross section along the transparent vertical plane. The measured data are compared to the theoretical phase functions.