MEMS micromirror is a key element of many optical system. Mirror performance is measured thanks to the unique 3D time-sequence topography the DHM characterization allows :
Micromirror topography is recorded along the MEMS excitation period for each mode shape. The full-field measurement allow the MEMS designer to characterize :
More details please visit another application page MEMS Micromirror
The DHM® unique optical configuration and the large objective collection enables measurement through glass viewport.
Two methods are used to compute modal frequency :
Optical shutter is in-plane optical MEMS : silicon parts move in liquids between two glasses. Optimization of in-plane performance requires minimization of out-of-plane displacement.
The DHM® records time-sequence of 3D topographies up to 25 MHz, this unique set of data is recorded with a single instrument. It is the sole instrument that measures the evolution of 3D topography along the excitation period. This unique set of data contains also analog and digital electrical inputs.
Recording of in- & out-of-plane is perfectly synchronized, there is no bias introduce by a scanning mechanism or measurement combination.
The silicon elements are moving between two glasses in liquid. Compensation of liquid and glass thickness is possible thanks to the DHM® unique optical configuration.
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