MEMS Actuator
Device with “large” in-plane displacement
Micromotor are used in micro-scale surgery, assembly, propulsion, and actuation among others. To provide large displacements, they are often composed by thin beams and mobile parts that move in-plane over large distances. Their in-plane displacement is not the only important parameter, their buckling, out-of-plane parasitic displacement and vibrations need also to be characterized.
DHM® allows to track any moving element of the micro motor and to measure simultaneously its out-of-plane displacement in air, liquid, or vacuum, through glass window.
Description :
- Courtesy of : TU Chemnitz, Germany
- Material : Silicon
- Instrument : DHM R-1000, 1.25x magnification
- Time scale : live measurement @ 45fps
Micromotor under vacuum
DHM® systems are compatible with glass corrected objectives to ensure optimal optical quality measurement at both low and high magnification when measuring through a transparent window
Thin structure – large displacement
MEMSTool proprietary advance software algorithms enable to process DHM® 3D topography time sequence and to provide:
- Decomposition of displacements into in- and out-of plane components
- Dynamical analysis of buckling and vibrations
- Velocity and acceleration measurement
Get X-Y-Z displacement simultaneously
Accelerometer and gyroscope proof masses, vibrating wheels, or other sensing parts move generally both in- and out-of-plane, and often in vacuum.. Their characterization require both ultimate resolution and large measurement range.
Track any moving element and measure simultaneously its out-of-plane displacement
DHM® acquire time-sequence of 3D topographies. This unique set of data combined with pattern tracking and edge detection algorithms provide reliable results in presence of :
- functional and sacrificial holes
- deposition and patterns
- non-flat surface
An unrivaled measurement range
From floor noise level to large displacement, the Holographic MEMS Analyzer provides :
- In-plane displacement from nanometers to millimeters
- Out-of-plane displacement from picometers to hundreds of micrometers
Fast In-plane displacement
Optical shutter is in-plane optical MEMS : silicon parts move in liquids between two glasses. Optimization of in-plane performance requires minimization of out-of-plane displacement.
In- & out-of-plane displacement are recorded simultaneously
The DHM® records time-sequence of 3D topographies up to 25 MHz, this unique set of data is recorded with a single instrument. It is the sole instrument that measures the evolution of 3D topography along the excitation period. This unique set of data contains also analog and digital electrical inputs.
Recording of in- & out-of-plane is perfectly synchronized, there is no bias introduce by a scanning mechanism or measurement combination.
- In-plane displacement
- Out-of-plane displacement
Measurement in liquid
The silicon elements are moving between two glasses in liquid. Compensation of liquid and glass thickness is possible thanks to the DHM® unique optical configuration.
Visit our catalog of objective lens.
