MEMS Probing Platform

Stage-top probing platform

The MEMS probing platform enables direct DHM® characterization on MEMS devices without wire-bonding for chips and wafers sizes up to 6 inches. The probing platform is composed by a rotatable vacuum sample holder and by two magnetic platforms for probe positioners.

Vacuum holder enables stable positioning of the sample. It is particularly useful for reliable stitching of multiple measurements with high lateral resolution on large surfaces or devices.

4″ wafers :

  • Up to 4 magnetic probe positioners,
    XY range 7mm,  XY resolution < 20 microns, vertical range (Z) 25mm
  • Sample holder: mechanical clamps and vacuum
  • Sample rotation: ±10°
  • Sample size: chips to  4” wafer

8″ wafers :

  • Up to 4 magnetic probe positioners,
    XY range 7mm,  XY resolution < 20 microns, vertical range (Z) 25mm
  • Sample holder: mechanical clamps and vacuum
  • Sample rotation: ±10°
  • Sample size: chips to  8″ wafers

Included in the system

  • Two magnetic probe positionners
  • Tips (tungsten carbide), set of 10
  • All cables

Compatibility

Stage-top probing platform
Wafer probing under the DHM®

Heated stage-top probing platform

The heated MEMS probing platform integrates a hotplate with the sample holder, enables direct DHM® characterization on MEMS devices with adjustable substrate temperature for characterization of chips and wafers up to 4 inch diameter. The heated probing platform is composed by a rotatable vacuum sample holder, a hotplate and two magnetic platforms for probe positioners.

Vacuum holder enables stable positioning of the sample. It is particularly useful in reliable stitching of multiple measurements with high lateral resolution on large surfaces or devices.

Specification :

  • Up to 4 magnetic probe positioners,
    XY range 7mm,  XY resolution < 20 microns, vertical range (Z) 25mm
  • Sample holder temperature up to 200°C, homogeneity over the holder ± 3°C. Electronic regulation (feedback loop) and manual control of temperature,
  • Conductive top plate to prevent ESD
  • Sample holder: mechanical clamps and vacuum
  • Sample rotation: ±10°
  • Sample size: from 4mm  to 4”

Included in the system

  • Two magnetic probe positionners
  • Tips (tungsten carbide), set of 10
  • BNC cable, 1.50 m, 50 Ohm COAX, 1.50m
  • Heat controller

Compatibility

Heated stage-top probing platform under DHM®

Probing at wafer level

DHM® can be mounted on most of the commercial probe stations. It enables fast wafer level screening of the static and dynamical characteristics of microdevices as well as the study of their statistical dispersion.

There is many different probe station on the market. Lyncée Tec collaborates closely with probe station manufacturers to provide you with your preferred solutions. Each integration is carefully engineered by our team to answer your personal probe station choice and measurement requirements.

DHM® integration on a Cascade probe station