Motorized Stages
Description
Motorized sample stages enable to focalize the sample by adjusting its vertical (Z) position and to handily move samples along the X and Y directions. They can be controlled either by a dedicated window of Koala acquisition and analysis software, or by using a joystick improving the ease of use.
Measurement possibilities :
- Fast and automated stitching of multiple measurements
- Efficient auto-focus (also on mirror-like samples)
- Automation of multiple measurements on a grid of samples
Motorized stages for DHM®
Several motorized stages offering various motion ranges are available. Choice varies for Reflection DHM® and Transmission DHM®. Custom XYZ sample stages with other motion ranges are available on request for both DHM® types.
| Travel range (X x Y x Z) | X, Y min step size | X, Y max speed | Z resolution | Max load |
| 100 x 100 x 38 mm | 0.04 μm | 24 mm/s | 20 nm | 10 kg |
| 150 x 150 x 38 mm | 0.04 μm | 60 mm/s | 20 nm | 10 kg |
| 200 x 200 x 38 mm | 0.10 μm | 60 mm/s | 20 nm | 10 kg |
| 300 x 300 x 38 mm | 0.04 μm | 60 mm/s | 20 nm | 10 kg |
Motorized stages for transmission DHM®
| Travel range (X x Y x Z) | X, Y min step size | X, Y max speed | Z resolution | Max load |
| 114 x 76 x 38 mm | 0.01 μm | 60 mm/s | 20 nm | 10 kg |
