Industrial Interferometer
Interferometric resolution, fast measurements, and robustness
Automated wafer inspection
Lyncée Tec offers both standard and customized solutions for industrial, OEM, and quality control applications.
DHM® non-scanning technology enables high-throughput characterization of 3D topographies, structure heights, micro-optical component geometries, MEMS, surface finish, and defects, among other things. Samples can be measured on the fly, without stopping the motorized stage.
Industrial solutions are generally composed of the following parts:
- DHM® heads
- Software User Interfaces
- Industrial-grade motorized workstations
- Sample support
DHM® measurement heads
All DHM developed by Lyncée are robust and reliable and can be used for quality control.
However, many quality control applications do not require the versatility of systems dedicated to research work. Their number of features can be limited, and their size and weight reduced.
Lyncée has therefore developed simplified and even more robust DHM for micro- and macroscopic fields of view, and different vertical ranges.. They are designed specifically to meet the exacting demands of quality control.
Consult Lyncée’s experts to choose the best system for your needs.
Sample support
The large variety of DHM applications has lead Lyncée to develop sample holders adapted to many inspections:
- Chucks for many different material (Wafers, chips, systems, paper sheets, …)
- Rotating support for cylinders and tubes
- Holders for orientation of spheres, balls, rolls, prothesis along 5D
- Convey trays
- …
Lyncée’s application specialist will help you to define the best sample holder for your application.
Industrial-grade motorized workstations
Laboratory and research motorized stage are high quality, but are often not sufficient in terms of speed, and heavy duty work for quality control applications.
Therefore, Lyncée offers include Industrial-grade motorized workstations. They include , and on request cabinet for protecting from air flows, or acoustic enclosures.
System up to 5 axis have been integrated (Hexapods, 5 axis XYZ-θφ)
Passive and active damping can be added for quality control of vibration sensitive samples, such MEMS, and adding an addition level of stability and robustenss to the system.
Software User Interfaces (UI)
Quality control software can be developed either by the users using our remote TCP-IP software module, or our Koala SDK.
Alternatively our team of experienced engineers to provide you with turnkey solutions according to your specifications.
Among our standard UI developped by Lyncée, we have applications for micro-lens wafer inspection, micromirror array inspection, and siliconization of syringes and containers.
Automated wafer inspection
Measurement on Production Floor
- Sample displacement up to 15 cm/sec
- Measurement rate up to 200 Hz
- No need of anti-vibration working station
Numerical Reconstruction
- Digital sample focusing without mechanical adjustment
- Tilt-tip correction performed digitally
3D measurement with metrological precision and stability
- Traceability: intrinsic vertical calibration
- Reliable instrument: no complex scanning mechanism
Nanometer faster than ever
DHM® is the only technology providing a reliable 3D measurement at high throughput. 3D Optical Inspection offers you significant benefits in terms of production quality, time saving and innovation.
Save time & cost through…
- Detect failure early in the process and avoid expensive recalls
- Reduce your maintenance costs, use DHM® instrument that has an intrinsically stable reference and requires only limited calibration
- Have long MTBF (mean time between failure) thanks to the absence of complex scanning mechanism
Innovate to keep your competitive advantages
- Be a pioneer making 3D measurement at high throughput and on production floor
- Access a new dimension with unique DHM® optical information, all DHM® innovative solutions are compatible with industrial inspection
- Control roughness according to ISO standard
- Measure areas larger than the field of view with fast and automated stitching
Use an instrument adapted to the industrial environment
- Ease of automation and integration in your IT production system
- Limited training required as the system is adapted to production operator use
- Modular DHM® head can be mounted on your production line or integrated in your instrument
- 3D measurement on production floor thanks to the robust and reliable system
Competitive Strength
3D optical inspection by LyncéeTec exploits the strength of digital holography to offer the first instrument performing 3D measurement and compatible with industrial throughput.
DHM® vs 2D inspection system
2D inspection systems are widely used for industrial inspection. They offer high measurement rates over a large field of view but the drawback is that they do not record topography information, but only intensity and color information. From the hologram, DHM® provides phase and intensity information. The phase can be interpreted to obtain surface topography, surface finish parameters or characterization of transparent layers that cannot be observed with 2D systems.
| Features | DHM® | 2D inspection System |
| 3D Topography | ||
| Surface finish | ||
| Transparent material | ||
| Moving sample | ||
| Digital focusing |
DHM® vs 3D Scanning Technology
Scanning Technology as Laser Scanning Confocal Microscopy (LSCM) or White Light Interferometer (WLI) have a low measurement rate and are sensitive to vibrations. DHM® overcomes these limitations.
| Features | DHM® | Scanning Technology |
| 3D measurement | ||
| Intrinsic vertical calibration | ||
| Moving sample | ||
| Robust against vibrations | ||
| Digital focusing |
Application Cases
For industrial 3D optical inspection, the first system installed by Lyncée Tec was dedicated to quality control in the watch industry. An important step has been achieved in 2010 by demonstrating measurement on a convey tray, i.e measurements without stopping the sample, and without any mechanical adjustment of the height of the sample for focalization. DHM® is currently used for 3D optical inspection in semiconductor, medical technology, watch, and solar industries, for controlling among others the following features:
- Topography
- Roughness measurement according to ISO standard
- Step height of SiO2 on Si wafers
- Sample’s aesthetic control
