Wafer chucks for DHM®
1" to 6" wafers
The 1″ to 6″ chuck holds wafers on DHM® 150x150x38 mm motorized stage. It is rotatable, for alignment of wafers chips along the stage axis. Vacuum holder enables stable positioning of the sample. It is particularly useful for reliable stitching of multiple measurements with high lateral resolution on large surfaces or devices.
Specifications
- Wafer size : 1″ to 6″
- Sample rotation: 360°
Included in the pack
- 6″ vacuum and rotatable wafer chuck
- Set of adaptation plates to hold 1″ to 4″ wafers
- Vacuum pump, tubing and accessories
Compatibility
- DHM®-R Series
- 150x150x38 motorized stages.
Dice to 4" wafer
The dice to 4″ wafer chuck hold single dice and wafers up to 4″ on DHM® 100x100x38 mm motorized stage. It is rotatable, for alignment of wafers and chips along the stage axis. Vacuum holder enables stable positioning of the sample. It is particularly useful for reliable stitching of multiple measurements with high lateral resolution on large surfaces or devices.
Specifications
- Wafer size : 1″ to 4″
- Sample rotation: ±10°
Included in the pack
- Vacuum and rotatable wafer chuck
- Vacuum pump, tubing and accessories
Compatibility
- DHM®-R Series
- 100x100x38 motorized stages.
