The MEMS probing platform enables direct DHM® characterization on MEMS devices without wire-bonding for chips and wafers sizes up to 8 inches. The probing platform is composed by a rotatable vacuum sample holder and by two magnetic platforms for probe positioners.
Vacuum holder enables stable positioning of the sample. It is particularly useful for reliable stitching of multiple measurements with high lateral resolution on large surfaces or devices.
The heated MEMS probing platform integrates a hotplate with the sample holder, enables direct DHM® characterization on MEMS devices with adjustable substrate temperature for characterization of chips and wafers up to 4 inch diameter. The heated probing platform is composed by a rotatable vacuum sample holder, a hotplate and two magnetic platforms for probe positioners.
Vacuum holder enables stable positioning of the sample. It is particularly useful in reliable stitching of multiple measurements with high lateral resolution on large surfaces or devices.
DHM® can be mounted on most of the commercial probe stations. It enables fast wafer level screening of the static and dynamical characteristics of microdevices as well as the study of their statistical dispersion.
There is many different probe station on the market. Lyncée Tec collaborates closely with probe station manufacturers to provide you with your preferred solutions. Each integration is carefully engineered by our team to answer your personal probe station choice and measurement requirements.