DHM®     DIGITAL HOLOGRAPHIC MICROSCOPY
 
Search
  Home arrow Applications arrow Micro-optics
| Print |
Micro-optics applications
Microlenses
High aspect-ratio samples
Double-sided structures

3D phase image of 1:1.4 high aspect-ratio corner cubes imaged in transmission configuration with DHM T1000.

High aspect-ratio micro-optics

High aspect-ratio samples are common samples to be characterized in micro-optics technology. Their shape, surface quality (roughness, defects, scratches,…) must often be measured to certify the sample specifications. The DHM T1000, in conjunction with the use of immersion liquids, provides a versatile instrument to measure, in real-time and without contact, the 3D topography (with nanometric vertical resolution) and the unknown refractive index of high aspect-ratio micro optics, .

For example, measurements of corner cubes microstructures with a high aspect-ratio 1:1.4 are easily obtained as presented in the following documents.

 

Application Note:

Use of immersion liquids in Digital Holographic Microscopy

Conference Proceedings:

"Digital Holographic Microscopy for nanometric quality control of micro-optical components",  J. Kühn, F. Charrière, T. Colomb, E. Cuche, Y. Emery and C. Depeursinge, SPIE Proceeding Photonics West San Jose 2007
"Measurements of corner cubes microstructures by high magnification digital holographic microscopy",  J. Kühn, E. Cuche, Y. Emery, T. Colomb, F. Charrière, F. Montfort, A. M. Marian, M.Botkine, N. Aspert, C. Depeursinge, Conference: Photonics Europe 2006, Strasbourg, France - 517 kB (.pdf)