Lynceetec - Specifications

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Specifications

R2200 series

R2100 series

R1100 series

R1000 series

T1000 series

Koala Software

Objectives

Stroboscopic module

R1100 series

System

Measurement techniques:

single and dual wavelength digital holographic microscopy in reflection and vertical coherence scanning

Image types:

intensity and quantitative phase contrast image (DHM mode), optical topography (vertical scanning)

Light sources:

two monochromatic laser sources

Sample stage:

manual or automated XYZ stages up to 150 mm × 150 mm × 12.5 mm travel range

Camera:

1392 x 1040 pixel, 8 bits

Available objectives:

standard, high NA, long working distance, water/oil immersion microscope objectives

Objective mounting:

4-position turret

Computer:

Dell workstation with latest Intel ^® processor, optimized and configured for DHM, with 19” SXGA monitor

Software:

Lyncée Tec proprietary Koala classic software based on a C++ and .NET

Optional working mode:

stroboscopic mode

Performance

Measurement mode:

Single
wavelength

Dual wavelength

Vertical scanning

Accuracy ¹ :

0.1 nm

25 nm (0.1 nm) ⁴

0.5 µm

Vertical resolution ² :

0.2 nm

50 nm (0.2 nm) ⁴

1.0 µm

Repeatability ³ :

< 0.01 nm

< 0.25 nm (< 0.01 nm) ⁴

< 0.05 µm

Vertical calibration:

determined by the wavelength, no mechanical movement calibration

Vertical measuring range in single wavelength:

up to depth of field for smooth samples, up to 340 nm for sharp edge samples

Vertical measuring range in dual wavelength:

up to depth of field for smooth samples, up to 10 µm for sharp edge samples

Vertical measuring range in vertical scanning:

up to 10 mm, z-stage dependent

Lateral resolution:

objective dependent, down to 300 nm with oil immersion objectives (1.4 NA)

Field of view:

objective dependent up to 4.4 mm

Working distance:

objective dependent from 0.3 mm to 18 mm

Digital focusing range:

up to 50× depth of field (objective dependent)

Grabbing time (1 hologram):

down to 1 µs in a single image grab

Spatial sampling:

1024 x 1024 pixels (hologram)

Acquisition rate:

15 fps (1024 × 1024 pixels) (optional up to 300 fps)

Single wavelength reconstruction rate:

15 fps (512 × 512 pixels), 4 fps (1024 × 1024 pixels)

Dual wavelength acquisition time:

1.5 s

Vertical scanning acquisition time:

scanning speed: 6 µm/s, reconstruction time: 6 s

Min. sample reflectivity:

less than 1%

Sample illumination:

down to 1 µW/cm2

Power requirements

Input voltage:

85-260 VAC - 50/60 Hz

Power requirements (w/o computer):

max 480 W

Dimensions & weight

Microscope:

R1101

R1102

Dimensions (L × W × H):

600 × 600 × 800 mm

900 × 900 × 850 mm

Weight:

45 kg

80 kg

Maximum sample size (L × W):

8 × 415 mm

530 × 870 mm

Specifications are subject to change without notice

¹ As demonstrated by taking the temporal standard deviation on 1 pixel over 30 measurements*.
² Defined as twice the accuracy.
³ As demonstrated by taking the one sigma Rq value of 30 repeatability measurements* on SiC reference mirror.
⁴ When combined to single wavelength measurements.
* 1 measurement is the average of 10 acquisitions.

			DHM^® DIGITAL HOLOGRAPHIC MICROSCOPY
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