Ultra-precise motorized sample stages for stitching, auto-focus and automated procedures

Used in conjunction with DHM, motorized stages enhance the potential and the flexibility of your system:

	full automation of your measurements
	analysis of large surfaces using high NA objectives
	easy, precise and repeatable positioning of your sample
	auto-focus
	extended vertical measuring range

The motorized sample stage is a full coordinate system designed for both DHM families of reflection or transmission microscopes and their applications in material and life science.

Repeated measurement cycles on user-defined positions enable you to fully automate your measurements. Statistics and/or time interval measurements can be performed by a simple parametrization of the motorized stage software.

Stitching enables you to analyze larger surfaces than the objective given field of view. It also allows you to select higher magnification objectives to analyze your sample with higher numerical aperture for better lateral resolution, higher sample slopes,... The included module joins up to 10’000 images together, positioning automatically the sample into focus, searching for the optimal coherence for each image and correcting an eventual tilt. Up to 100 images can be stitched in full resolution. For larger field of views, the software automatically resizes the images.

The motorized Z-axes enable the vertical scanning on reflection configured DHMs. This measurement is performed by scanning the sample vertically and returning the sample’s shape with coarse resolution.

Key motorized sample stage performances:

	X/Y travel range up to 300 mm
	Z travel range up to 20 mm
	velocity up to 125 mm/s
	resolution down to 7 nm
	incremental motion of minimum 0.05 μm
	repeatability down to 0.1 μm
	load capacity up to 100 kg

The top aluminum sample plate is used to attach a variety of part-holding fixtures and stage accessories: universal stage insert, inserts for wafers or petri-dish

Compatible instruments:

R2200 series, R2100 series, R1100 series, R1000 series, T1000 series

Downloads:

DHM Motorized Stages (english version - pdf . kB)