manual or automated XYZ stages up to 150 mm × 150 mm × 12.5 mm travel range
Camera:
1392 x 1040 pixel, 8 bits
Available objectives:
standard, high NA, long working distance, water/oil immersion microscope objectives
Objective mounting:
4-position turret
Computer:
Dell workstation with latest Intel ® processor, optimized and configured for DHM, with 19” SXGA monitor
Software:
Lyncée Tec proprietary Koala classic software based on a C++ and .NET
Optional working mode:
stroboscopic mode
Performance
Measurement mode:
Single wavelength
Short Dual wavelength
Long Dual wavelength
Vertical scanning
Accuracy 1 :
To be announced
Vertical resolution 2 :
To be announced
Repeatability 3 :
To be announced
Vertical calibration:
determined by the wavelength, no mechanical movement calibration
Vertical measuring range in single wavelength:
up to depth of field for smooth samples, up to 340 nm for sharp edge samples
Vertical measuring range in dual wavelength:
up to depth of field for smooth samples, up to 15 µm for sharp edge samples
Vertical measuring range in vertical scanning:
up to 10 mm, z-stage dependent
Lateral resolution:
objective dependent, down to 300 nm with oil immersion objectives (1.4 NA)
Field of view:
objective dependent up to 4.4 mm
Working distance:
objective dependent from 0.3 mm to 18 mm
Digital focusing range:
up to 50× depth of field (objective dependent)
Grabbing time (1 hologram):
down to 1 µs in a single image grab
Spatial sampling:
1024 x 1024 pixels (hologram)
Acquisition rate:
15 fps (1024 × 1024 pixels) (optional up to 300 fps)
Reconstruction rate (single & dual wavelengths):
15 fps (1024 × 1024 pixels)
Alternate dual wavelength acquisition time:
500 ms
Vertical scanning acquisition time:
scanning speed: 6 µm/s, reconstruction time: 6 s
Min. sample reflectivity:
less than 1%
Sample illumination:
down to 1 µW/cm2
Power requirements
Input voltage:
85-260 VAC - 50/60 Hz
Power requirements (w/o computer):
max 480 W
Dimensions & weight
Microscope:
R2201
R2201-L
Dimensions (L × W × H):
600 × 600 × 800 mm
900 × 900 × 850 mm
Weight:
45 kg
80 kg
Maximum sample size (L × W):
8 × 415 mm
530 × 870 mm
Specifications are subject to change without notice
1 As demonstrated by taking the temporal standard deviation on 1 pixel over 30 measurements* (measured on DHM R2201). 2 Defined as twice the accuracy. 3 As demonstrated by taking the one sigma Rq value of 30 repeatability measurements* on SiC reference mirror (measured on DHM R2201). 4 When combined to single wavelength measurements. * 1 measurement is the average of 10 acquisitions.
Products 
R2200 series 
