Microtechnology has a great need for metrological instruments performing quality control of their specimens at high acquisition rates. The shape and the roughness must be very precisely characterized and defects such as scratches, cracks, material inhomogeneities or veils amongst others must be detected.

The DHM™ systems are versatile contact less instruments, ideal for quality control in microtechnology, measuring the shape (nanometric vertical resolution and lateral resolution down to 300nm), with a high acquisition rate up to 15 fps. An optional vertical scanning mode implemented on DHM™ R1000 allows the extension of  the vertical measurement range, similar to vertical scanning in white light interferometry.

Finally, digital processing implemented in the Koala Software provides unique tools for surface analysis. The surface fitting tool gives direct access to quantitative shape information using different shape models (polynomial, spherical, cylindrical,...). The form factor suppression tool computes the residual surface, obtained from the subtraction of the fitting surface to the measured surface. The residual surface makes more apparent small defects and allows calculation of the roughness parameters for any shaped form (waviness, roughness, R_a, R_t,...).

Roughness Defects detection

DHM™ instruments bring you information unavailable with other microscopic techniques.