The constraints imposed on micro-optics, such as microlenses (spherical, cylindrical, square...), gratings, prisms, corner cubes, and in particular micro-optics wafers are extremely demanding. DHM instruments are ideal systems for precisely controlling the shape, the surface quality (roughness, defects detection) and the optical performance of the micro-optics and the uniformity of these parameters across the wafer. Indeed, the DHM systems are versatile instruments allowing measurement with a nanometric vertical resolution of the topography. The measurements are performed in real-time without a calibration process or dependence on the micro-optics. Digital tools implemented in the Koala Software allow simple and accurate digital focusing, compensation of movement or orientation of the specimen and quantitative evaluation of micro optic shape, radius of curvature, surface quality and aberration coefficients.

In addition DHM techniques, in conjunction with a patented decoupling procedure, allow the separate measurement of mean refractive index and topography. The use of immersion liquids allows precision measurement of high ratio micro-optics or the individual characterization of  the two interfaces of double-sided structured micro-optics.

Microlenses High aspect-ratio samples Double-sided structures

DHM instruments bring you information unavailable with other microscopic techniques.