The DHM™ system is an incomparable technique for real-time observation of MEMS and MOEMS, such as micropumps, accelerometers, video projector micromirrors. It allows the retrieval of the full three dimensional information with a nanometric vertical resolution for in-plane and out-of-plane MEMS and MOEMS movements.

The short acquisition time (a few microseconds for standard cameras) makes DHM™ instruments insensitive to external vibrations. The stroboscopic mode allowsthe  measurement of the optical topography throughout the periodic movement (excitation frequencies up toup to 100kHz ) permitting the analysis of resonant behaviour, settling time, stability, repeatability. Numerous parameters can also be specified by the operator such as signal shape, amplitude, frequency range amongst others.

For very fast non-periodic movements, up to 10'000 images per second can be recorded and reconstructed later.

Out-of-plane motion In-plane motion

DHM™ instruments bring you information unavailable with other microscopic techniques.