Fast and robust nanometric surface topography

The DHM R1000 is a reflection configuration microscope. It is suitable for totally and partially reflecting objects. Its ability to work with low reflective interfaces (down to 1% reflectivity), makes it the ideal tool for rapid inspection and accurate surface topography measurements on a large variety of samples.

As a result of its very high vertical resolution better than 1 nanometer, DHM R1000 is particularly suited for applications on smooth and polished surfaces with an averaged roughness of less than 0.2 µm. For higher averaged roughnesses, DHM performances depend on the specimen geometry, and on the desired measurements. Vertical scanning, available as an option, allows the vertical measurement range to be increased, but with a decreased vertical resolution.

Thanks to its high acquisition rate and ease of use, DHM R1000 allows rapid routine inspections, automated industrial quality control as well as R&D applications, particularly for dynamic observations. Stroboscopic synchronisation is available as an option and enables characterization of high frequency periodic motions.

Its application fields includes:

	Industrial metrology			MEMS & MOEMS
	Micro optics			Roughness measurements
	Surface analysis			Unlabelled biochips quality control
	Micro injection			Semiconductors
	Material science			...

The set-up configuration allows a standard optical microscope objective to be mounted on the DHM R1000. Select the objective that fulfils the field of view and lateral resolution that you need.

The DHM R1000's possibilities are revealed by the Lyncée Tec patented Koala Software that interprets the acquired hologram.   

Downloads:

DHM 1000 Family brochure (.pdf 1.2 MB) (english version)
DHM 1000 Family brochure (.pdf 559 kB) (japanese version)